Investigation of strain distribution in LOCOS structures by dynamical simulation of LACBED patterns

Academic Article
Publication Date:
1999
Iris type:
01.01 Articolo in rivista
Keywords:
TRANSMISSION ELECTRON-MICROSCOPY; LOCAL ISOLATION STRUCTURES; DIFFRACTION
List of contributors:
Authors of the University:
Handle:
https://iris.cnr.it/handle/20.500.14243/198525
Published in:
ULTRAMICROSCOPY
Journal