Chemical and Structural Properties of a-Si/SiON Multilayer Stacks on c-Si

Abstract
Publication Date:
2005
Iris type:
04.02 Abstract in Atti di convegno
Keywords:
a-Si/SiON; multilayers
List of contributors:
Handle:
https://iris.cnr.it/handle/20.500.14243/125405
Book title:
International Conference on Defects: Recognition, Imaging and Physics in Semiconductors (11, 2005, Beijing)
Published in:
MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING
Journal