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MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING
Rivista
Codice:
E106699
ISSN:
1369-8001
Dati Generali
Dati Generali
Pubblicazioni (98)
Pulisci
Ordina Pubblicazioni:
ascendente
decrescente
Activation annealing of ultra-low-energy implanted boron in silicon: a study combining experiment and process modeling
Articolo
Atomic oxygen-assisted molecular beam deposition of Gd2O3 films for ultra-scaled Ge-based electronic devices
Articolo
Atomic transport properties and electrical activation of ultra-low energy implanted boron in crystalline silicon
Articolo
Au thin films nano-structuration on polycrystalline anatase and rutile TiO
2
substrates towards photocatalytic applications
Articolo
Barrier inhomogeneity in vertical Schottky diodes on free standing gallium nitride
Articolo
Bismuth doping of silicon compatible thin films for telecommunications and visible light emitting devices
Articolo
Carrier concentration profiles in 6H-SiC by scanning capacitance microscopy
Articolo
Cathodoluminescence characterization of SnO2 nanoribbons grown by vapor transport technique
Articolo
Cathodoluminescence characterization of beta-SiC nanowires and surface-related silicon dioxide
Articolo
Chemical and Structural Properties of a-Si/SiON Multilayer Stacks on c-Si
Abstract
Combined electrochemical atomic layer epitaxy and microcontact printing techniques
Articolo
Competition between internal and heavy doping gettering options in epi-silicon
Articolo
Competitive delineation of n- and p-doped Si by selective electrochemical etch
Articolo
Crystal structure assessment of Ge-Sb-Te nanowires
Articolo
Crystallization properties of Sb-rich GeSbTe alloys by in-situ morphological and electrical analysis
Articolo
Current injection from metal to MoS2 probed at nanoscale by conductive atomic force microscopy
Articolo
Deep and shallow electronic states associated to doping, contamination and intrinsic defects in ?-Ga2O3 epilayers
Articolo
Defect evolution and dopant activation in laser annealed Si and Ge
Articolo
Defect studies on silicon and silicon-germanium for PV and optoelectronic applications
Articolo
Defects related to electrical doping of 4H-SiC by ion implantation
Articolo
Design and fabrication of integrated Si-based optoelectronic devices
Articolo
Doping of silicon nanocrystals
Articolo
Dry oxidation of MBE-SiGe films: rate enhancement, Ge redistribution and defect injection
Articolo
Effect of high temperature annealing (T > 1650 degrees C) on the morphological and electrical properties of p-type implanted 4H-SiC layers
Articolo
Effects of VLS and VS mechanisms during shell growth in GaAs-AlGaAs core-shell nanowires investigated by transmission electron microscopy
Articolo
Effects of thermal annealing on the structural properties of sputtered W-Si-N diffusion barriers
Articolo
Epitaxial anatase HfO2 on high-mobility substrate for ultra-scaled CMOS devices
Articolo
Fabrication of ultra-shallow junctions with high electrical activation by excimer laser annealing
Articolo
Fabrication of ultra-shallow junctions with high electrical activation by excimer laser annealing
Articolo
Fabrication of ultra-shallowjuncti ons with high electrical activation by excimer laser annealing
Articolo
Formation and stability of germanium oxide induced by atomic oxygen exposure
Articolo
From thin film to bulk 3C-SiC growth: Understanding the mechanism of defects reduction
Articolo
Gas sensing applications of the inverse spinel zinc tin oxide
Articolo
Growth and characterization of thin Al-rich AlGaN on bulk GaN as an emitter-base barrier for hot electron transistor
Articolo
H2 production by photocatalytic reforming of oxygenated compounds using TiO2-based materials
Articolo
High-resolution scanning capacitance microscopy by angle bevelling
Articolo
Impact of surface reflectivity on the ultra-fast laser melting of silicon-germanium alloys
Articolo
Indiffusion of oxygen in germanium induced by pulsed laser melting
Articolo
Influence of growth parameters on properties of electroceramic thin films grown via MO-CVD
Articolo
Infrared spectroscopy and transmission electron microscopy of polycrystalline silicon carbide
Articolo
Investigations on the nanostructures of GaN, InN and InxGa1-xN
Articolo
Isolation of bidimensional electron gas in AlGaN/GaN heterojunction using Ar ion implantation
Articolo
Keggin heteropolyacid supported on BN and C3N4: Comparison between catalytic and photocatalytic alcohol dehydration
Articolo
Kinetic Monte Carlo simulations of vacancy evolution in graphene
Articolo
Laser annealing in Si and Ge: Anomalous physical aspects and modeling approaches
Articolo
Laser crystallization of amorphous TiO2 on polymer
Articolo
Laser induced crystallization of sputtered MoS2 thin films
Articolo
Modification of graphene oxide and graphene oxide-TiO2 solutions by pulsed laser irradiation for dye removal from water
Articolo
Modification of the sheet resistance under Ti/Al/Ni/Au Ohmic contacts on AlGaN/GaN heterostructures
Articolo
Molecularly imprinted N-doped TiO2 photocatalysts for the selective degradation of o-phenylphenol fungicide from water
Articolo
Morphological and electrical properties of Nickel based Ohmic contacts formed by laser annealing process on n-type 4H-SiC
Articolo
Nitrogen doped spongy TiO
2
layers for sensors application
Articolo
Non-collinear magnetic states of Mn5Ge3 compound
Articolo
Nonequilibrium aspects of armchair graphene nanoribbon conduction
Articolo
Ohmic contacts on n-type and p-type cubic silicon carbide (3C-SiC) grown on silicon
Articolo
Optical and electrical characteristics of 17 keV X-rays exposed TiO2 films and Ag/TiO2/p-Si MOS device
Articolo
Origin of the fluctuations in the luminescence emission in InGaN quantum wells
Articolo
Oxidation of ion implanted silicon carbide
Articolo
P-type conduction in ion-implanted amorphized Ge
Articolo
Phosphorus activation in silicon: To deglaze or not to deglaze, that is the question
Articolo
Photocatalytic activity of CuO and Cu
2
O nanowires
Articolo
Photocatalytic and antibacterial properties of titanium dioxide flat film
Articolo
Photocatalytic properties of carbon nanotubes/titania nanoparticles composite layers deposited by electrophoresis
Articolo
Photocatalytical activity of amorphous hydrogenated TiO2 obtained by pulsed laser ablation in liquid
Articolo
Polysilicon thin-film transistors on polymer substrates
Articolo
Positive temperature coefficient of resistivity in thin films of barium titanate
Articolo
Praseodymium based high-k dielectrics grown on Si and SiC substrates
Articolo
Preparation of SrRuO3 films for advanced CMOS metal gates
Articolo
Profiling of traps in SiO2/Al2O3 gate stack by the charge pumping technique
Articolo
Properties of Al2O3 thin films deposited on 4H-SiC by reactive ion sputtering
Articolo
Pulsed laser deposition of PMN thin films
Articolo
Raman probing of hydrogen-intercalated graphene on Si-face 4H-SiC
Articolo
Reversibility of surface damage induced in SiC detectors by low intensity laser plasma
Articolo
Review of technology for normally-off HEMTs with p-GaN gate
Articolo
Role of point defects on B diffusion in Ge
Articolo
SCTS: scanning capacitance transient spectroscopy
Articolo
Sb-implanted ZnO ultra-thin films
Articolo
Sensing pulsed light by means of Multi-Walled Carbon Nanotubes
Articolo
Silicon doped by molecular doping technique: Role of the surface layers of doped Si on the electrical characteristics
Articolo
Silicon p-n junctions biased above breakdown used as monitors of carrier lifetime
Articolo
Simulation of scanning capacitance microscopy measurements on micro-sectioned and bevelled n(+)-p samples
Articolo
Strain characterisation of shallow trench isolation structures on a nanometer scale by convergent beam electron diffraction
Articolo
Structural and Magnetic properties of GeMn diluted magnetic semiconductor
Articolo
Structural and electrical properties of AlN thin films on GaN substrates grown by plasma enhanced-Atomic Layer Deposition
Articolo
Structural and vibrational properties of high-dielectric oxides, HfO2 and TiO2: A comparative study
Articolo
Structural properties of SiO2 films prepared by plasma-enhanced chemical vapor deposition
Articolo
Surface photovoltage measurements for Cu, Ti and W determination in Si wafers
Articolo
Synthesis of ZnO nanofibers by the electrospinning process
Articolo
Synthesis of ZnO/PMMA nanocomposite by low-temperature atomic layer deposition for possible photocatalysis applications
Articolo
Temperature-dependent Fowler-Nordheim electron barrier height in SiO2/4H-SiC MOS capacitors
Articolo
The effects of baking cycles on the properties of ferroelectric thin films
Articolo
TiO2 nanowires on Ti thin film for water purification
Articolo
Transients during pre-breakdown and hard breakdown of thin gate oxides in metal-SiO2-Si capacitors
Articolo
Ultrashallow profiling of semiconductors by secondary ion mass spectrometry: methods and applications
Articolo
Wide band gap semiconductors technology for next generation of energy efficient power electronics
Articolo
XPS and IPE analysis of HfO2 band alignment with high-mobility semiconductors
Articolo
XRD and EXAFS studies of HfO2 crystallisation in SiO2-HfO2 films
Articolo
ZnO for application in photocatalysis: From thin films to nanostructures
Articolo
No Results Found
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