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JOURNAL OF MICROMECHANICS AND MICROENGINEERING
Rivista
Codice:
E092754
ISSN:
0960-1317
Dati Generali
Dati Generali
Pubblicazioni (21)
Pulisci
Ordina Pubblicazioni:
ascendente
decrescente
A fully integrated GaAs-based three-axis Hall magnetic sensor exploiting self-positioned strain released structures
Articolo
Evaluation of different PDMS interconnection solutions for silicon, Pyrex and COC microfluidic chips
Articolo
Excitation and time resolved spectroscopy of SAW harmonics up to GHz regime in photolithographed GaAs devices
Articolo
Fabrication and electromechanical actuation of epitaxial SrTiO3 (001) microcantilevers
Articolo
Fabrication of capacitive absolute pressure sensors by thin film vacuum encapsulation on SOI substrates
Articolo
Fabrication of fiber-optic broadband ultrasound emitters by micro-opto-mechanical technology
Articolo
Fabrication of low loss MOMS resonators for quantum optics experiments
Articolo
Focused ion beam fabrication procedures of x-ray micro Fresnel zone plates
Articolo
High throughput electron beam lithography on insulating substrates for photonic devices
Articolo
Hybrid chemical etching of femtosecond laser irradiated structures for engineered microfluidic devices
Articolo
Maskless, fast and highly selective etching of fused silica with gaseous fluorine and gaseous hydrogen fluoride
Articolo
Micromachined filters for 38 and 77 GHz supported on thin membranes
Articolo
Nonlinear behaviour of self-excited microcantilevers in viscous fluids
Articolo
Polymeric mask protection for alternative KOH silicon wet etching
Articolo
Polymide Based GaAs Micromachined Millimeter Wave Structures
Articolo
Rigid biodegradable photopolymer structures of high resolution using deep-UV laser photocuring
Articolo
Self-patterning of a polydimethylsiloxane microlens array on functionalized substrates and characterization by digital holography
Articolo
Sharp beveled tip hollow microneedle arrays fabricated by LIGA and 3D soft lithography with polyvinyl alcohol
Articolo
Tolerance analysis of a micro-optical detection system for on-line monitoring of lubricant oils
Articolo
Towards the development of an integrated neural connector: Technologies to fabricate nerve guidance channels and silicon dices
Articolo
Wideband mechanical response of a high-Q silicon double-paddle oscillator
Articolo
No Results Found
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