Identifier:
E110083
ISSN:
0946-7076
Overview
Outputs (30)
A compact package for integrated silicon thermal gas flow meters
Academic ArticleA new transparent Bio-MEMS for uni-axial single cell stretching
Academic ArticleA single chip, double channel thermal flow meter
Academic ArticleFabrication and test of RF MEMS in LTCC technology
Academic ArticleLow cost transparent SU-8 membrane mask for deep X-ray lithography
Academic ArticleMechanical modelling of capacitive RF MEMS shunt switches
Academic ArticleMicromachined gas sensors for environmental pollutants
Academic ArticleNiobium microelectrodes for submicron particle confinement
Academic ArticleRF MEMS Switches Fabrication by using SU-8 Technology
Academic ArticleNo Results Found