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MICROSYSTEM TECHNOLOGIES

Rivista

Codice:

E110083

ISSN:

0946-7076

Dati Generali

Dati Generali

Pubblicazioni (30)

Ordina Pubblicazioni:

ascendente
decrescente

A biomimetic approach to machine olfaction, featuring a very large-scale chemical sensor array and embedded neuro-bio-inspired computation

Articolo

A capacitance and optical method for the static and dynamic characterization of micro electro mechanical systems (MEMS) devices

Articolo

A compact package for integrated silicon thermal gas flow meters

Articolo

A microfluidic sensor in coplanar waveguide configuration for localized micrometric liquid spectroscopy in microwaves regime

Articolo

A new transparent Bio-MEMS for uni-axial single cell stretching

Articolo

A single chip, double channel thermal flow meter

Articolo

Cycling reliability of RF-MEMS switches with Gold-Platinum multilayers as contact material

Articolo

Deep X-ray lithography at ELETTRA using a central beam-stop to enhance adhesion

Articolo

Design and fabrication of high performance condenser microphone using C-slotted diaphragm

Articolo

Design of silicon micro-resonators with low mechanical and optical losses for quantum optics experiments

Contributo in Atti di convegno

Fabrication and test of RF MEMS in LTCC technology

Articolo

Femtosecond laser fabrication and characterization of microchannels and waveguides in methacrylate-based polymers

Articolo

Influence of design and fabrication on RF performance of capacitive RF MEMS switches

Articolo

Low cost transparent SU-8 membrane mask for deep X-ray lithography

Articolo

MEMS-based multi-modal vibration energy harvesters for ultra-low power autonomous remote and distributed sensing

Articolo

Mechanical modelling of capacitive RF MEMS shunt switches

Articolo

Micromachined gas sensors for environmental pollutants

Articolo

Multi-modal vibration based MEMS energy harvesters for ultra-low power wireless functional nodes

Articolo

Narrow-band filtering by means of triangular meta-material resonators based on RF MEMS cantilevers in CPW configuration

Articolo

Niobium microelectrodes for submicron particle confinement

Articolo

Out-of-plane deformation and pull-in voltage of cantilevers with residual stress gradient: experiment and modelling

Articolo

Production of identical pyramid wavefront sensors for multi-conjugate adaptive optic systems using the LIGA process

Articolo

RF MEMS Switches Fabrication by using SU-8 Technology

Articolo

Reliability of RF MEMS capacitive and ohmic switches for space redundancy configurations

Articolo

Reliability of RF MEMS switches due to charging effects and their circuital modelling

Articolo

Reliable response of RF MEMS LTCC packaged switches after mechanical and thermal stress

Articolo

Smoothing and Surface Planarization of Sacrificial Layers in MEMS Technology

Articolo

Ultra-low-power components for an RFID Tag with physical and chemical sensors

Articolo

Ultra-low-power components for an RFID Tag with physical and chemical sensors

Contributo in Atti di convegno

Wafer-level micropackaging in thin film technology for RF MEMS applications

Articolo

No Results Found

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