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JOURNAL OF VACUUM SCIENCE & TECHNOLOGY. A. VACUUM, SURFACES, AND FILMS

Journal
Identifier:
E094970
ISSN:
0734-2101
  • Overview

Overview

Outputs (55)

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AN ENERGY DISPERSION SPECTROSCOPY TECHNIQUE TO MEASURE TITANIUM SILICIDE LATERAL DIFFUSION
Academic Article
Chemical microanalysis by reflected electron energy loss microscopy
Academic Article
Comment on "Etch characteristics of CeO2 thin film in Ar/CF4/Cl2 plasma" [J. Vac. Sci. Technol. A 21, 426 (2003)]
Academic Article
Defect formation during chlorine-based dry etching and their effects on the electronic and structural properties of InP/InAsP quantum wells
Academic Article
Design and test of magnetic shields for quadrupole mass spectrometers
Academic Article
Design and test of magnetic shields for turbomolecular pumps
Academic Article
EVIDENCE OF SI-OH SPECIES AT THE SURFACE OF AGED SILICA
Academic Article
Hardness, elastic modulus, and wear resistance of hafnium oxide-based films grown by atomic layer deposition
Academic Article
High speed pellet injection with a two-stage pneumatic gun
Academic Article
III-V surface plasma nitridation: A challenge for III-V nitride epigrowth
Academic Article
III-V surface plasma nitridation: a challenge for III-V nitride epigrowth
Academic Article
INFLUENCES OF NOBLE-GASES (NE, AR, AND KR) ON MAGNETIC-PROPERTIES OF ION-BEAM SPUTTERED FE/SIO2 MULTILAYER FILMS - COMMENT
Academic Article
ION-BEAM-ASSISTED GROWTH OF BETA-FESI2
Academic Article
In situ soft x-ray fluorescence and absorption microspectroscopy: A study of Mn-Co/polypyrrole electrodeposition
Academic Article
Influence of surface oxygen on chemoresistance of tin oxide film
Academic Article
Influence of the deposition parameters on the electronic and structural properties of pulsed laser ablation prepared Si1-xCx thin films
Academic Article
Ion beam assisted deposition of Al films on Si
Academic Article
Lattice curvature of InxGa1-xAs/GaAs [001] graded buffer layers
Academic Article
Low-temperature electron cyclotron resonance plasma-enhanced chemical-vapor deposition silicon dioxide as gate insulator for polycrystalline silicon thin-film transistors
Academic Article
Microcrystalline silicon by plasma enhanced chemical vapor deposition from silicon tetrafluoride
Academic Article
Microstructural and morphological analysis of ultrathin YBa2Cu3O7-x films grown by modulated magnetron sputtering on SrTiO3 substrates
Academic Article
MoO3 films grown on polycrystalline Cu: Morphological, structural, and electronic properties
Academic Article
Molecular structure of organic compounds observed by high resolution scanning tunneling microscopy
Academic Article
Nanolaminated Al2O3/HfO2 dielectrics for silicon carbide based devices
Academic Article
Native and modified uncoated neurones observed with atomic force microscopy
Academic Article
Optical and structural properties of low thickness lead zirconate titanate films on sapphire substrates prepared via sol-gel method
Academic Article
PREPARATION AND CHARACTERIZATION OF LI-DOPED ZNO FILMS
Academic Article
Parametrization of optical properties of ITO thin films by SE: substrate interfacial reactivity
Academic Article
Parametrization of optical properties of indium-tin-oxide thin films by spectroscopic ellipsometry: Substrate interfacial reactivity
Academic Article
Parametrization of optical properties of indium-tin-oxide thin films by spectroscopic ellipsometry: Substrate interfacial reactivity
Academic Article
Phase transformations induced by rapid thermal annealing in Ti-Si and W-Si alloys
Academic Article
Physical characterization of hafnium oxide thin films and their application as gas sensing devices
Academic Article
Plasma deposition chemistry of amorphous silicon-carbon alloys from fluorinated gas
Academic Article
Plasma enhanced atomic layer deposition of Al2O3 gate dielectric thin films on AlGaN/GaN substrates: The role of surface predeposition treatments
Academic Article
Problems of determining true equilibrium pressures of hydrogen getters over a wide range of getter temperature and hydrogen sorption
Academic Article
Quantitative x-ray photoelectron spectroscopy analysis of inorganic mixtures
Academic Article
Review Article: Recommended reading list of early publications on atomic layer deposition - Outcome of the "virtual Project on the History of ALD"
Academic Article
SCANNING AUGER MICROSCOPY AND X-RAY PHOTOELECTRON-SPECTROSCOPY STUDIES OF ROMAN BRONZES
Academic Article
STUDY OF THE NF3 PLASMA CLEANING OF REACTORS FOR AMORPHOUS-SILICON DEPOSITION
Academic Article
STUDY OF THE PHOSPHINE PLASMA DECOMPOSITION AND ITS FORMATION BY ABLATION OF RED PHOSPHORUS IN HYDROGEN PLASMA
Academic Article
Scanning Auger microscopy studies of an ancient bronze
Academic Article
Soft x-ray photoelectron diffraction study of epitaxial InGaAs/GaAs(001)
Academic Article
Solid deuterium pellet injection with a two-stage pneumatic gun
Academic Article
Sorption properties and temperature-dependent near-surface chemistry of the BaLi4 intermetallic compound
Academic Article
Structural characterization of lead zirconate titanate thin films prepared on different electrodes and on silicon substrates
Academic Article
Surface analysis study of the oxidation of organotin films deposited by ArF excimer laser chemical vapor deposition
Academic Article
Synchrotron radiation photoemission analysis of ArF laser deposited tin oxide
Academic Article
Tailored synthesis of ZnO:Er(III) nanosystems by an hybrid RF-sputtering/Sol-Gel route
Academic Article
Thermal and excimer laser assisted growth of Si(1-x)Gex alloys from Si2H6 and GeH4 monitored by on line single wavelength ellipsometry and ex situ atomic force microscopy
Academic Article
Tuning of material properties of ZnO thin films grown by plasma-enhanced atomic layer deposition at room temperature
Academic Article
Wide band gap amorphous hydrogenated carbon films grown by plasma enhanced chemical vapour deposition
Academic Article
X-RAY PHOTOELECTRON-SPECTROSCOPY INVESTIGATION ON THE CHEMICAL-STRUCTURE OF AMORPHOUS-SILICON NITRIDE (a-SINX)
Academic Article
X-RAY-INDUCED REDUCTION EFFECTS AT CEO2 SURFACES - AN X-RAY PHOTOELECTRON-SPECTROSCOPY STUDY
Academic Article
X-ray photoelectron spectroscopy and scanning electron microscopy characterization of novel poly(monosubstituted) acetylenes containing doping species
Academic Article
X-ray photoelectron spectroscopy study of bombardment-induced compositional changes in ZrO2, SiO2, and ZrSiO4
Academic Article
No Results Found
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