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JOURNAL OF VACUUM SCIENCE & TECHNOLOGY. A. VACUUM, SURFACES, AND FILMS
Rivista
Codice:
E094970
ISSN:
0734-2101
Dati Generali
Dati Generali
Pubblicazioni (55)
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Ordina Pubblicazioni:
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AN ENERGY DISPERSION SPECTROSCOPY TECHNIQUE TO MEASURE TITANIUM SILICIDE LATERAL DIFFUSION
Articolo
Chemical microanalysis by reflected electron energy loss microscopy
Articolo
Comment on "Etch characteristics of CeO2 thin film in Ar/CF4/Cl2 plasma" [J. Vac. Sci. Technol. A 21, 426 (2003)]
Articolo
Defect formation during chlorine-based dry etching and their effects on the electronic and structural properties of InP/InAsP quantum wells
Articolo
Design and test of magnetic shields for quadrupole mass spectrometers
Articolo
Design and test of magnetic shields for turbomolecular pumps
Articolo
EVIDENCE OF SI-OH SPECIES AT THE SURFACE OF AGED SILICA
Articolo
Hardness, elastic modulus, and wear resistance of hafnium oxide-based films grown by atomic layer deposition
Articolo
High speed pellet injection with a two-stage pneumatic gun
Articolo
III-V surface plasma nitridation: A challenge for III-V nitride epigrowth
Articolo
III-V surface plasma nitridation: a challenge for III-V nitride epigrowth
Articolo
INFLUENCES OF NOBLE-GASES (NE, AR, AND KR) ON MAGNETIC-PROPERTIES OF ION-BEAM SPUTTERED FE/SIO2 MULTILAYER FILMS - COMMENT
Articolo
ION-BEAM-ASSISTED GROWTH OF BETA-FESI2
Articolo
In situ soft x-ray fluorescence and absorption microspectroscopy: A study of Mn-Co/polypyrrole electrodeposition
Articolo
Influence of surface oxygen on chemoresistance of tin oxide film
Articolo
Influence of the deposition parameters on the electronic and structural properties of pulsed laser ablation prepared Si1-xCx thin films
Articolo
Ion beam assisted deposition of Al films on Si
Articolo
Lattice curvature of InxGa1-xAs/GaAs [001] graded buffer layers
Articolo
Low-temperature electron cyclotron resonance plasma-enhanced chemical-vapor deposition silicon dioxide as gate insulator for polycrystalline silicon thin-film transistors
Articolo
Microcrystalline silicon by plasma enhanced chemical vapor deposition from silicon tetrafluoride
Articolo
Microstructural and morphological analysis of ultrathin YBa2Cu3O7-x films grown by modulated magnetron sputtering on SrTiO3 substrates
Articolo
MoO3 films grown on polycrystalline Cu: Morphological, structural, and electronic properties
Articolo
Molecular structure of organic compounds observed by high resolution scanning tunneling microscopy
Articolo
Nanolaminated Al2O3/HfO2 dielectrics for silicon carbide based devices
Articolo
Native and modified uncoated neurones observed with atomic force microscopy
Articolo
Optical and structural properties of low thickness lead zirconate titanate films on sapphire substrates prepared via sol-gel method
Articolo
PREPARATION AND CHARACTERIZATION OF LI-DOPED ZNO FILMS
Articolo
Parametrization of optical properties of ITO thin films by SE: substrate interfacial reactivity
Articolo
Parametrization of optical properties of indium-tin-oxide thin films by spectroscopic ellipsometry: Substrate interfacial reactivity
Articolo
Parametrization of optical properties of indium-tin-oxide thin films by spectroscopic ellipsometry: Substrate interfacial reactivity
Articolo
Phase transformations induced by rapid thermal annealing in Ti-Si and W-Si alloys
Articolo
Physical characterization of hafnium oxide thin films and their application as gas sensing devices
Articolo
Plasma deposition chemistry of amorphous silicon-carbon alloys from fluorinated gas
Articolo
Plasma enhanced atomic layer deposition of Al2O3 gate dielectric thin films on AlGaN/GaN substrates: The role of surface predeposition treatments
Articolo
Problems of determining true equilibrium pressures of hydrogen getters over a wide range of getter temperature and hydrogen sorption
Articolo
Quantitative x-ray photoelectron spectroscopy analysis of inorganic mixtures
Articolo
Review Article: Recommended reading list of early publications on atomic layer deposition - Outcome of the "virtual Project on the History of ALD"
Articolo
SCANNING AUGER MICROSCOPY AND X-RAY PHOTOELECTRON-SPECTROSCOPY STUDIES OF ROMAN BRONZES
Articolo
STUDY OF THE NF3 PLASMA CLEANING OF REACTORS FOR AMORPHOUS-SILICON DEPOSITION
Articolo
STUDY OF THE PHOSPHINE PLASMA DECOMPOSITION AND ITS FORMATION BY ABLATION OF RED PHOSPHORUS IN HYDROGEN PLASMA
Articolo
Scanning Auger microscopy studies of an ancient bronze
Articolo
Soft x-ray photoelectron diffraction study of epitaxial InGaAs/GaAs(001)
Articolo
Solid deuterium pellet injection with a two-stage pneumatic gun
Articolo
Sorption properties and temperature-dependent near-surface chemistry of the BaLi4 intermetallic compound
Articolo
Structural characterization of lead zirconate titanate thin films prepared on different electrodes and on silicon substrates
Articolo
Surface analysis study of the oxidation of organotin films deposited by ArF excimer laser chemical vapor deposition
Articolo
Synchrotron radiation photoemission analysis of ArF laser deposited tin oxide
Articolo
Tailored synthesis of ZnO:Er(III) nanosystems by an hybrid RF-sputtering/Sol-Gel route
Articolo
Thermal and excimer laser assisted growth of Si(1-x)Gex alloys from Si2H6 and GeH4 monitored by on line single wavelength ellipsometry and ex situ atomic force microscopy
Articolo
Tuning of material properties of ZnO thin films grown by plasma-enhanced atomic layer deposition at room temperature
Articolo
Wide band gap amorphous hydrogenated carbon films grown by plasma enhanced chemical vapour deposition
Articolo
X-RAY PHOTOELECTRON-SPECTROSCOPY INVESTIGATION ON THE CHEMICAL-STRUCTURE OF AMORPHOUS-SILICON NITRIDE (a-SINX)
Articolo
X-RAY-INDUCED REDUCTION EFFECTS AT CEO2 SURFACES - AN X-RAY PHOTOELECTRON-SPECTROSCOPY STUDY
Articolo
X-ray photoelectron spectroscopy and scanning electron microscopy characterization of novel poly(monosubstituted) acetylenes containing doping species
Articolo
X-ray photoelectron spectroscopy study of bombardment-induced compositional changes in ZrO2, SiO2, and ZrSiO4
Articolo
No Results Found
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