Absolute planarity with three-flat test: an iterative approach with Zernike polynomials

Articolo
Data di Pubblicazione:
2008
Abstract:
An iterative algorithm to analyze three-flat test data for absolute planarity measurements is presented. Using the properties of Zernike polynomial representations, results are achieved in a fast and effective manner. Details and demonstrative examples are provided.
Tipologia CRIS:
01.01 Articolo in rivista
Keywords:
optical testing; dimensional metrology; absolute planarity; three-flat test; Zernike polynomials
Elenco autori:
Link alla scheda completa:
https://iris.cnr.it/handle/20.500.14243/24083
Pubblicato in:
OPTICS EXPRESS
Journal