Charging Effects and related Equivalent Circuits for Ohmic Series and Shunt Capacitive RF MEMS Switches
Chapter
Publication Date:
2009
abstract:
charging effect in dielectrics are considered the major limiting factor for reliability of RF MEMS. Modeling is proposed for charging by using lumped elements too.
Iris type:
02.01 Contributo in volume (Capitolo o Saggio)
Keywords:
RF MEMS; charging; switches; reliability; lumped components
List of contributors:
Lucibello, Andrea; DE ANGELIS, Giorgio; Bartolucci, Giancarlo; Proietti, Emanuela; Marcelli, Romolo
Book title:
New Developments in Micro Electro Mechanical Systems for Radio Frequency and Millimeter Wave Applications