Charging Effects and related Equivalent Circuits for Ohmic Series and Shunt Capacitive RF MEMS Switches
Capitolo di libro
Data di Pubblicazione:
2009
Abstract:
charging effect in dielectrics are considered the major limiting factor for reliability of RF MEMS. Modeling is proposed for charging by using lumped elements too.
Tipologia CRIS:
02.01 Contributo in volume (Capitolo o Saggio)
Keywords:
RF MEMS; charging; switches; reliability; lumped components
Elenco autori:
Lucibello, Andrea; DE ANGELIS, Giorgio; Bartolucci, Giancarlo; Proietti, Emanuela; Marcelli, Romolo
Link alla scheda completa:
Titolo del libro:
New Developments in Micro Electro Mechanical Systems for Radio Frequency and Millimeter Wave Applications