AlN on polysilicon piezoelectric cantilevers for sensors/actuators

Academic Article

Publication Date:

2009

Iris type:

01.01 Articolo in rivista

List of contributors:

DE VITTORIO, Massimo; Cingolani, Roberto; Maruccio, Giuseppe; Passaseo, ADRIANA GRAZIA; Todaro, MARIA TERESA

Authors of the University:

PASSASEO ADRIANA GRAZIA

TODARO MARIA TERESA

Handle:

https://iris.cnr.it/handle/20.500.14243/234775

Published in:

MICROELECTRONIC ENGINEERING

Journal