MASS-SPECTROMETRIC THERMAL EVOLUTION OF NOVEL INDIUM METALORGANIC PRECURSORS FOR MOCVD

The thermal behaviour of dialkylindium-dialkylamides R2InNR?2 (R,R? = Me, Et) and dialkylindium-azolides R2InNR? (NR? = Pyrrole, Pyrazole) has been examined by a mass spectrometric thermal evolution technique, in the temperature range 30-400 °C. Data on volatility, identity of gasified molecules, threshold temperature and products of the decomposition processes are reported and discussed