MASS-SPECTROMETRIC THERMAL EVOLUTION OF NOVEL INDIUM METALORGANIC PRECURSORS FOR MOCVD
Contributo in Atti di convegno
Data di Pubblicazione:
1993
Abstract:
The thermal behaviour of dialkylindium-dialkylamides R2InNR?2 (R,R? = Me, Et) and dialkylindium-azolides R2InNR? (NR? = Pyrrole, Pyrazole) has been examined by a mass spectrometric thermal evolution technique, in the temperature range 30-400 °C. Data on volatility, identity of gasified molecules, threshold temperature and products of the decomposition processes are reported and discussed
Tipologia CRIS:
04.01 Contributo in Atti di convegno
Elenco autori:
Capezzuto, Pio; Losurdo, Maria; Bruno, Giovanni; Porchia, Marina; Rossetto, GILBERTO LUCIO; Cicala, Grazia
Link alla scheda completa:
Titolo del libro:
CHEMICAL PERSPECTIVES OF MICROELECTRONIC MATERIALS III
Pubblicato in: