Coalescence inhibition in nanosized titania films and related effects on chemoresistive properties towards ethanol

Titania films were deposited via radio frequency sputtering from a Ti/Mo metallic target. The films were characterized as sensing layers for ethanol detection. Compositional, morphological and structural investigations were carried out by electron microscopy techniques and Rutherford backscattering spectroscopy. Results indicated that the metallic layer deposited by inert sputtering underwent oxidation and formation of coarse grained titania as a consequence of thermal treatments. Electrical characterization showed that the layers were sensitive to ethanol within a useful range for applications.