Microwave MEMS Switches in Series Configuration: Technology and Circuital Modeling
Capitolo di libro
Data di Pubblicazione:
2005
Abstract:
Micromachined MEMS switches for microwave applications have been manufactured, tested and modelled. A series, coplanar waveguide (CPW) configuration has been studied, with the aim to improve the contact resistance. In particular, contact dimples have been included and the shape of the movable bridge has been changed by adding deformable wing-like extensions. Single switch devices have been tested between 0.045 MHz and 40 GHz by measuring on-wafer the scattering electrical parameters.
Tipologia CRIS:
02.01 Contributo in volume (Capitolo o Saggio)
Keywords:
RF MEMS; switches; modeling
Elenco autori:
Marcelli, Romolo
Link alla scheda completa:
Titolo del libro:
Sensors and Microsystems, Proceedings of the 9th Italian Conference