Phenomenological Modeling of MEMS Switches for Microwave Applications

Microelectromechanical (MEM) switches have been recently considered as alternative key elements with respect to PIN diode switches for high frequency applications. In spite of many configurations proposed in literature, a full theoretical modeling of the MEM switches is still in progress by using numerical and analytical approaches. In this paper, a phenomenological modeling of a classical MEM switch configuration is presented, to describe the microwave performances resulting from this mechanical device.