Publication Date:
2003
abstract:
A fabrication process for the construction of micromachined switches has ben designed, developed and tested for producing mechanical test structures and actuated capacitive switches for microwave applications.
Iris type:
02.01 Contributo in volume (Capitolo o Saggio)
Keywords:
Micromachining; RF MEMS; Switch
List of contributors:
Marcelli, Romolo
Book title:
Radio Frequency MEMS