Data di Pubblicazione:
2003
Abstract:
A fabrication process for the construction of micromachined switches has ben designed, developed and tested for producing mechanical test structures and actuated capacitive switches for microwave applications.
Tipologia CRIS:
02.01 Contributo in volume (Capitolo o Saggio)
Keywords:
Micromachining; RF MEMS; Switch
Elenco autori:
Marcelli, Romolo
Link alla scheda completa:
Titolo del libro:
Radio Frequency MEMS