Theoretical Investigation of the Temperature and Pressure Behavior of SAW and Lamb Waves Propagating Along 3C-SiC/AlN

The propagation of surface acoustic waves (SAW) and Lamb waves travelling along 3C-SiC/c-AlN multilayers is investigated by theoretical calculation with respect to the AlN and SiC thickness and acoustic wave propagation direction. The pressure and temperature effects on the phase velocity have been studied in order to go insight the design tradeoff of temperature compensated microwave devices for pressure sensing applications.