Optical emission spectroscopy and growth of NbN films by pulsed laser deposition

We study the fluorescence spectra corresponding to deposition parameters suitable to grow superconducting NbN films of the cubic phase by using a pulsed laser deposition technique in a N2 atmosphere. A Nd-YAG laser beam having k=532 nm focused on either a pure Nb or a NbN targets generated the plasma. Photoemission spectra in the wavelength region [600-630] nm of excited ions within the plume region have been analyzed either for a Nb or a NbN target in the presence of He, Ar, and N 2 gas at different pressure values. The possibility of a reactive process between N 2 and Nb occurring in the plume region is discussed.