Photoluminescence Study of Low Thermal Budget III-V Nanostructures on Silicon by Droplet Epitaxy
Academic Article
Publication Date:
2010
abstract:
We present of a detailed photoluminescence
characterization of high efficiency GaAs/AlGaAs quantum
nanostructures grown on silicon substrates. The whole
process of formation of the GaAs/AlGaAs active layer was
realized via droplet epitaxy and migration enhanced epitaxy
maintaining the growth temperature B350C, thus
resulting in a low thermal budget procedure compatible
with back-end integration of the fabricated materials on
integrated circuits.
Iris type:
01.01 Articolo in rivista
List of contributors:
Fedorov, Alexey
Published in: