Photoluminescence Study of Low Thermal Budget III-V Nanostructures on Silicon by Droplet Epitaxy
Articolo
Data di Pubblicazione:
2010
Abstract:
We present of a detailed photoluminescence
characterization of high efficiency GaAs/AlGaAs quantum
nanostructures grown on silicon substrates. The whole
process of formation of the GaAs/AlGaAs active layer was
realized via droplet epitaxy and migration enhanced epitaxy
maintaining the growth temperature B350C, thus
resulting in a low thermal budget procedure compatible
with back-end integration of the fabricated materials on
integrated circuits.
Tipologia CRIS:
01.01 Articolo in rivista
Elenco autori:
Fedorov, Alexey
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