High resolution delineation of bi-dimensional dopant profiles in silicon: early stages of diffusion from cobalt silicide layers

Conference Paper
Publication Date:
1993
Iris type:
04.01 Contributo in Atti di convegno
List of contributors:
Authors of the University:
Handle:
https://iris.cnr.it/handle/20.500.14243/248603
Published in:
PROCEEDINGS OF THE EUROPEAN SOLID STATE DEVICE RESEARCH CONFERENCE
Series