Organometallic Compounds as Precursors for Chemical Vapor Deposition of Thin Films of Inorganic Materials
Conference Paper
Publication Date:
1998
Iris type:
04.01 Contributo in Atti di convegno
Keywords:
MOCVD; Precursor; Synthesis; Thin Film
List of contributors:
Gerbasi, Rosalba; Porchia, Marina; Rossetto, GILBERTO LUCIO
Book title:
Advanced Materials and Processes: YUCOMAT '97
Published in: