Optical Emission Spectroscopy and Laser Interferometry in the Study of Silicon Film deposition from SiCl4 Glow Discharges
Abstract
Publication Date:
1984
Iris type:
04.02 Abstract in Atti di convegno
List of contributors:
Cicala, Grazia
Book title:
Atti del XVII Congresso Nazionale di Chimica Inorganica