TEM two-dimensional profiles of B in silicon through sub-micrometer mask

Conference Paper
Publication Date:
1994
Iris type:
04.01 Contributo in Atti di convegno
List of contributors:
Authors of the University:
Handle:
https://iris.cnr.it/handle/20.500.14243/245804
Book title:
ELECTRON MICROSCOPY 1994, VOLS 2A AND 2B: APPLICATIONS IN MATERIALS SCIENCES