Thermal decapping of As-capped GaAs (100) surfaces: a scanning probe microscopy study
Contributo in Atti di convegno
Data di Pubblicazione:
1996
Abstract:
As capping represents one of the most important ways of protecting the GaAs (100) surface from air oxidation during the transfer from the MBE chamber to another UHV system not directly coonected with it. The paper describes the most relevant results achied by scanning probe microscopy on GaAs surfaces after thermal decapping of As-capped GaAs (100) surfaces.
Tipologia CRIS:
04.01 Contributo in Atti di convegno
Keywords:
SEMICONDUCTOR; GaAs; Scanning probe microscopy; X-RAY PHOTOELECTRON SPECTROSCOPY; GROWTH MODEL
Elenco autori:
Ingo, GABRIEL MARIA; Padeletti, Giuseppina
Link alla scheda completa:
Titolo del libro:
ECASIA 1995 - Proceedings of the European Conference on Applications of Surface and Interface Analysis