Ultrahigh-Vacuum Soft X-ray reflectometer

We have designed, built, and tested a new instrument for soft x-ray scattering experiments. The reflectometer works under ultrahigh vacuum and permits in situ preparation and characterization of the samples. In particular, deposition and sputtering operations can be performed while measuring x-ray scattering. We report the results of test measurements performed using synchrotron radiation. The precision of the combined positioning of sample and detector angles is better than 0.01degrees. Separately, sample and detector rotations have a repeatability that is better than 0.005degrees. Applications will be in the field of surface physics, with emphasis on magnetic properties of surfaces, thin films, and multilayered structures.