Boron doping of silicon using excimer laser

Conference Paper
Publication Date:
1989
Iris type:
04.01 Contributo in Atti di convegno
List of contributors:
Authors of the University:
Handle:
https://iris.cnr.it/handle/20.500.14243/182234
Book title:
LASER- AND PARTICLE-BEAM CHEMICAL PROCESSES ON SURFACES
Published in:
MRS PROCEEDINGS
Series