Characterization of polycrystalline 3C(beta)-SiC thin films for MEMS and pressure sensors application
Conference Paper
Publication Date:
2004
abstract:
Characterization of cubic 3C(beta)-SiC samples for pressure sensors and micro-electromechanical system (MEMS) applications is reported in this paper.
Iris type:
04.01 Contributo in Atti di convegno
Keywords:
SiC; MEMS; Pressure sensor
List of contributors: