Characterization of polycrystalline 3C(beta)-SiC thin films for MEMS and pressure sensors application

Contributo in Atti di convegno
Data di Pubblicazione:
2004
Abstract:
Characterization of cubic 3C(beta)-SiC samples for pressure sensors and micro-electromechanical system (MEMS) applications is reported in this paper.
Tipologia CRIS:
04.01 Contributo in Atti di convegno
Keywords:
SiC; MEMS; Pressure sensor
Elenco autori:
Link alla scheda completa:
https://iris.cnr.it/handle/20.500.14243/324575