Determination of lattice plane curvature and dislocation Burgers vector density in crystals by rocking curve imaging technique

Conference Paper
Publication Date:
2003
abstract:
[object Object]
Iris type:
04.01 Contributo in Atti di convegno
Keywords:
Digital topography; Dislocation Burgers vectors; Lattice tilt mapping; Semiconductor wafers; X-ray imaging
List of contributors:
Handle:
https://iris.cnr.it/handle/20.500.14243/311275
Published in:
PROCEEDINGS OF SPIE, THE INTERNATIONAL SOCIETY FOR OPTICAL ENGINEERING
Series