Determination of lattice plane curvature and dislocation Burgers vector density in crystals by rocking curve imaging technique

Contributo in Atti di convegno
Data di Pubblicazione:
2003
Abstract:
[object Object]
Tipologia CRIS:
04.01 Contributo in Atti di convegno
Keywords:
Digital topography; Dislocation Burgers vectors; Lattice tilt mapping; Semiconductor wafers; X-ray imaging
Elenco autori:
Link alla scheda completa:
https://iris.cnr.it/handle/20.500.14243/311275
Pubblicato in:
PROCEEDINGS OF SPIE, THE INTERNATIONAL SOCIETY FOR OPTICAL ENGINEERING
Series