LARGE AREA FABRICATION METHOD BASED ON THE LOCAL OXIDATION OF SILICON AND/OR DIFFERENT MATERIALS ON MICRO- AND NANO-SCALE

Patent
Publication Date:
2005
Iris type:
06.01 Brevetto di invenzione industriale
List of contributors:
Authors of the University:
Handle:
https://iris.cnr.it/handle/20.500.14243/174333