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An efficient silicon micromachining technique for thermally-based microsystems
Conference Paper
Publication Date:
2005
Iris type:
04.01 Contributo in Atti di convegno
List of contributors:
Mancarella, Fulvio; Roncaglia, Alberto; Sanmartin, Michele; Pizzochero, Giulio; Severi, Maurizio; Cardinali, GIAN CARLO
Authors of the University:
MANCARELLA FULVIO
PIZZOCHERO GIULIO
RONCAGLIA ALBERTO
SANMARTIN MICHELE
Handle:
https://iris.cnr.it/handle/20.500.14243/69305
