All-silicon optically-interrogated power sensor for microwaves and millimetre waves

A new non-disturbing optically interrogated silicon sensor for measuring electromagnetic power in the microwave and millimetre-wave range is presented. A prototype was realised and then tested in the microwave frequency range 2.5-18GHz. A minimum detectable electromagnetic power density of approx. 1.4mW/cm 2 was measured. Higher performances are expected, according to simulations, in optimised devices.