Evolution of Interface Properties During Atomic Layer Deposition of Rare Earth-based High-k Dielectrics on Si, Ge and III-V Substrates

Conference Paper
Publication Date:
2010
Iris type:
04.01 Contributo in Atti di convegno
List of contributors:
Authors of the University:
Handle:
https://iris.cnr.it/handle/20.500.14243/70170