Data di Pubblicazione:
2003
Abstract:
We describe the design and demonstrate a two-axis tip-tilt
platform stacked on a translation stage for combined x-ray and
optical interferometry, electronically controlled to compensate
for parasitic rotations and straightness errors. The
key characteristic of the platform is its carrying out
translations and rotations by sliding. In spite of the potential
stop-and-go motion, an x-ray interferometer was successfully
operated and guiding errors were kept to within 1 nrad and 1 nm.
The platform made it possible the motion of the x-ray interferometer up to a couple of millimetres.
In addition, the combined x-ray and optical interferometer allowed
us to investigate the micro-dynamics of sliding.
Tipologia CRIS:
01.01 Articolo in rivista
Keywords:
nanotecnologia; misurazioni; ing. precisione; metrologia
Elenco autori:
Bergamin, Angelo; Massa, Enrico; Mana, Giovanni; Cavagnero, GIOVANNI BATTISTA
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