Aluminium Nitride nanostructures deposited by rf magnetron sputtering

Abstract

Publication Date:

2019

Iris type:

04.02 Abstract in Atti di convegno

Keywords:

aluminium nitride nanostructures; rf magnetron sputtering; superhard rhodium boride films

List of contributors:

Benetti, Massimiliano; Cannata', Domenico; DI PIETRANTONIO, Fabio; Rau, Dzhulietta; Fosca, Marco

Authors of the University:

BENETTI MASSIMILIANO

CANNATA' DOMENICO

DI PIETRANTONIO FABIO

FOSCA MARCO

RAU DZHULIETTA

Handle:

https://iris.cnr.it/handle/20.500.14243/408095