MOCVD of platinum (100) oriented films on random Hastelloy C 276

Academic Article
Publication Date:
1999
abstract:
The deposition of (100)-oriented platinum films on Hastelloy C276 from platinum acetylacetonate was studied. The (100)-oriented Pt films showed a well-defined crystalline structure with 100 nm wide grains. The thickness of the columnar crystallites was about 2000 nm. The average roughness of the Pt (100)-oriented films was about 100 nm.
Iris type:
01.01 Articolo in rivista
Keywords:
CHEMICAL-VAPOR-DEPOSITION; REACTION-MECHANISMS; THIN-FILMS; KINETICS; PRECURSORS
List of contributors:
Authors of the University:
Handle:
https://iris.cnr.it/handle/20.500.14243/454187
Published in:
CHEMICAL VAPOR DEPOSITION
Journal