MOCVD of platinum (100) oriented films on random Hastelloy C 276

The deposition of (100)-oriented platinum films on Hastelloy C276 from platinum acetylacetonate was studied. The (100)-oriented Pt films showed a well-defined crystalline structure with 100 nm wide grains. The thickness of the columnar crystallites was about 2000 nm. The average roughness of the Pt (100)-oriented films was about 100 nm.