Compact micropumping system based on LIGA fabricated microparts

This report presents design, fabrication and testing of a magnetically actuated microgear pumps based on the LIGA technology. These micropumps exhibit flow rates between 0.5 and 8.5 ml/min and head pressures up to 100 cm-H2O. Geometries are determined for an optimal magnetic coupling, resulting in a linear behavior of the flow rate versus rotation speed. (c) 2006 Published by Elsevier B.V.