Strain determination in submicron isolation structures by TEM/CBED

Conference Paper
Publication Date:
1999
Iris type:
04.01 Contributo in Atti di convegno
List of contributors:
Authors of the University:
Handle:
https://iris.cnr.it/handle/20.500.14243/198471
Book title:
MICROSCOPY OF SEMICONDUCTING MATERIALS 1999
Published in:
INSTITUTE OF PHYSICS CONFERENCE SERIES
Series