Fabrication of nanoelectrodes for hybrid molecular-electronic devices

Since the typical size of a biomolecule or nanocrystal is of the order of few nanometers, hybrid molecular-electronic (HME) devices require the fabrication of electrodes with nanometer separation. In this work, we report on fabrication of metallic electrodes with separation less than 10 nm combining electron beam lithography (EBL) and metal electrodeposition. The shape of the electrodes was tailored for the particular device application. Both nanocrystals and single molecules were connected to the electrodes to implement new functional devices. © 2004 IEEE.