Low-cost chip-integrable silicon-based all-optical infrared light micromodulator

A novel amorphous-silicon-based photonic micromodulator is proposed which can be easily integrated into silicon low-cost optoelectronic appliances. The device is designed to operate at the two infrared communication wavelengths of 1300 and 1550 nm, either on broad or narrow spectrum sources, and is activated by visible light pulses controlling the infrared light absorption coe.cient through the generation of free carriers. A planar waveguide integrated prototype has been fabricated on a silicon wafer by plasma enhanced chemical vapour deposition, and tested at bit rates up to 200 kbit/s.