Data di Pubblicazione:
2012
Abstract:
The effect of substrate temperature on amorphous Silicon crystallization, mediated by metal impurity is reported. Bilayers of Ni(200nm)/Si(400nm) are deposited on fused silica substrate by electron beam evaporator at 200 and 500 oC. Raman mapping shows that, 2 to 5 micron size crystalline silicon clusters are distributed over the entire surface of the sample. X-ray diffraction and X-ray absorption spectroscopy studies demonstrate silicon crystallizes over the metal silicide seeds and grow with the annealing temperature.
Tipologia CRIS:
04.02 Abstract in Atti di convegno
Keywords:
Metal induced crystallization; Silicon; XRD; Raman; X-ray Absorption spectroscopy
Elenco autori:
Rocca, Francesco
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