Data di Pubblicazione:
2012
Abstract:
Buried GaSb junctions were realized through Zn diffusion in Te-doped GaSb bulk
crystals, the p-dopant being supplied through the epitaxial deposition of a heavily
Zn-doped GaAs layer on GaSb. Structural and electrical investigations confirm
the build-up of buried junctions, induced by Zn diffusion within GaSb, with
satisfying rectifying properties. Surprisingly, the p-n junctions are formed more
deeply with respect to the Zn diffusion front. A local rising up of the native
acceptor density is assumed to drive the p-type conductivity conversion of the
GaSb substrate beyond the Zn penetration depth.
Tipologia CRIS:
04.01 Contributo in Atti di convegno
Keywords:
GaSb; heterojunction; deep levels; DLTS
Elenco autori:
Baldini, Michele; Frigeri, Cesare; Gombia, Enos
Link alla scheda completa:
Titolo del libro:
Ninth International Conference on Advanced Semiconductor Devices and Microsystems