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Mechanical characterization of 3C-SiC grown on Si micromachined cantilever
Conference Poster
Publication Date:
2010
Iris type:
04.03 Poster in Atti di convegno
Keywords:
SiC; stress; MEMS
List of contributors:
Ranzieri, Paolo; Attolini, Giovanni; Nasi, Lucia; Bosi, Matteo; Watts, BERNARD ENRICO
Authors of the University:
BOSI MATTEO
NASI LUCIA
Handle:
https://iris.cnr.it/handle/20.500.14243/99696
