Evaluation of curvature and stress in 3C-SiC grown on differently oriented Si substrates

Conference Poster
Publication Date:
2010
Iris type:
04.03 Poster in Atti di convegno
Keywords:
SiC; stress; CURVATURE; growth
List of contributors:
Authors of the University:
Handle:
https://iris.cnr.it/handle/20.500.14243/99693